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Sputtering by Particle Bombardment III: Characteristics of Sputtered Particles, Technical Applications
. Ed(S): Behrisch, Rainer; Wittmaack, Klaus
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Description for Sputtering by Particle Bombardment III: Characteristics of Sputtered Particles, Technical Applications
paperback. Editor(s): Behrisch, Rainer; Wittmaack, Klaus. Series: Topics in Applied Physics. Num Pages: 415 pages, 66 black & white illustrations, 6 black & white tables, biography. BIC Classification: PNFS; TBC; TGM. Category: (P) Professional & Vocational. Dimension: 235 x 155 x 23. Weight in Grams: 664.
Sputtering, the ejection of atoms or groups of atoms from the surface of a solid bombarded by energetic particles, is a widely observed phenomenon that has many applications in today's experimental physics and technology. This is the third and final volume of a comprehensive review on sputtering. Whereas the first two volumes deal primarily with physical aspects such as the theory of sputtering, experimentally observed sputtering yields and surface topography changes, this volume is devoted to the characteristic properties of the sputtered particles and technological applications of sputtering. The particles are characterized by their energy, mass, and angular distributions, along ... Read more
Sputtering, the ejection of atoms or groups of atoms from the surface of a solid bombarded by energetic particles, is a widely observed phenomenon that has many applications in today's experimental physics and technology. This is the third and final volume of a comprehensive review on sputtering. Whereas the first two volumes deal primarily with physical aspects such as the theory of sputtering, experimentally observed sputtering yields and surface topography changes, this volume is devoted to the characteristic properties of the sputtered particles and technological applications of sputtering. The particles are characterized by their energy, mass, and angular distributions, along ... Read more
Product Details
Format
Paperback
Publication date
2014
Publisher
Springer Germany
Number of pages
415
Condition
New
Series
Topics in Applied Physics
Number of Pages
415
Place of Publication
Berlin, Germany
ISBN
9783662311042
SKU
V9783662311042
Shipping Time
Usually ships in 15 to 20 working days
Ref
99-15
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