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Modeling of Microfabrication Systems
Nassar, Raja; Dai, Weizhong
€ 193.77
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Description for Modeling of Microfabrication Systems
Hardback. Addresses modelling of systems that are important to the fabrication of three-dimensional microstructures. This title focuses on high aspect ratio microtechnology, ranging from ion beam micromachining to x-ray lithography. Series: Microtechnology and MEMS. Num Pages: 270 pages, biography. BIC Classification: GB; PB; TBN. Category: (P) Professional & Vocational; (U) Tertiary Education (US: College). Dimension: 234 x 156 x 17. Weight in Grams: 576.
This is the first book to address modelling of systems that are important to the fabrication of three-dimensional microstructures. It is unique in that it focuses on high aspect ratio microtechnology, ranging from ion beam micromachining to x-ray lithography.
This is the first book to address modelling of systems that are important to the fabrication of three-dimensional microstructures. It is unique in that it focuses on high aspect ratio microtechnology, ranging from ion beam micromachining to x-ray lithography.
Product Details
Format
Hardback
Publication date
2003
Publisher
Springer-Verlag Berlin and Heidelberg GmbH & Co. KG Germany
Number of pages
270
Condition
New
Series
Microtechnology and MEMS
Number of Pages
270
Place of Publication
Berlin, Germany
ISBN
9783540002529
SKU
V9783540002529
Shipping Time
Usually ships in 15 to 20 working days
Ref
99-15
Reviews for Modeling of Microfabrication Systems
From the reviews: "This book is aimed at people working on simulation and optimization process fabrication of Microelectromechanical Systems (MEMS). … the book provides a fairly complete view of the modeling of microfabrication processes. … ‘It will be invaluable to scientists, engineers, graduate students, and manufacturers engaged in research and development for enhancing the accuracy ... Read more