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Atomic Layer Deposition for Semiconductors
Cheol . Ed(S): Seong Hwang
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Description for Atomic Layer Deposition for Semiconductors
hardcover. Atomic Layer Deposition for Semiconductors Editor(s): Seong Hwang, Cheol. Num Pages: 273 pages, 89 black & white illustrations, 81 colour illustrations, 3 black & white tables, 1 colour. BIC Classification: THR; TJFD5; UKS. Category: (P) Professional & Vocational. Dimension: 235 x 155 x 20. Weight in Grams: 578.
This edited volume discusses atomic layer deposition (ALD) for all modern semiconductor devices, moving from the basic chemistry of ALD and modeling of ALD processes to sections on ALD for memories, logic devices, and machines. The section on ALD for memories covers both mass-produced memories, such as DRAM and Flash, and emerging memories, such as PCRAM and FeRAM. The section on ALD for logic devices covers both front-end of the line processes and back-end of the line processes. The final section on ALD for machines looks at toolsets and systems hardware. Each chapter provides the history, operating principles, and a ... Read more
This edited volume discusses atomic layer deposition (ALD) for all modern semiconductor devices, moving from the basic chemistry of ALD and modeling of ALD processes to sections on ALD for memories, logic devices, and machines. The section on ALD for memories covers both mass-produced memories, such as DRAM and Flash, and emerging memories, such as PCRAM and FeRAM. The section on ALD for logic devices covers both front-end of the line processes and back-end of the line processes. The final section on ALD for machines looks at toolsets and systems hardware. Each chapter provides the history, operating principles, and a ... Read more
Product Details
Format
Hardback
Publication date
2013
Publisher
Springer United States
Number of pages
273
Condition
New
Number of Pages
263
Place of Publication
New York, NY, United States
ISBN
9781461480532
SKU
V9781461480532
Shipping Time
Usually ships in 15 to 20 working days
Ref
99-15
About Cheol . Ed(S): Seong Hwang
Cheol Seong Hwang received M.S. and Ph.D. degrees from Seoul National University, Seoul, Korea, in 1989 and 1993, respectively. In 1993, he joined the Material Science and Engineering Laboratory at the National Institutes of Standards and Technology, Gaithersburg, MD, as a Postdoctoral Research Fellow. He then joined Samsung Electronics Company, Ltd., as a Senior Researcher in 1994. In 1998, Dr. ... Read more
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