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Microsystem Technology and Microrobotics
Fatikow, Sergej; Rembold, Ulrich
€ 195.40
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Description for Microsystem Technology and Microrobotics
Paperback. Num Pages: 408 pages, biography. BIC Classification: TJFM1; UYF. Category: (P) Professional & Vocational. Dimension: 234 x 156 x 21. Weight in Grams: 646.
Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and controllers for medical, automotive, household and many other purposes. This book is a basic introduction to MST for students, engineers, and scientists. It is the first of its kind to cover MST in its entirety. It gives a comprehensive treatment of all important parts of MST such as microfabrication technologies, microactuators, microsensors, development and testing of microsystems, and information processing in microsystems. It surveys products built to ... Read more
Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and controllers for medical, automotive, household and many other purposes. This book is a basic introduction to MST for students, engineers, and scientists. It is the first of its kind to cover MST in its entirety. It gives a comprehensive treatment of all important parts of MST such as microfabrication technologies, microactuators, microsensors, development and testing of microsystems, and information processing in microsystems. It surveys products built to ... Read more
Product Details
Format
Paperback
Publication date
2010
Publisher
Springer-Verlag Berlin and Heidelberg GmbH & Co. KG Germany
Number of pages
408
Condition
New
Number of Pages
408
Place of Publication
Berlin, Germany
ISBN
9783642082320
SKU
V9783642082320
Shipping Time
Usually ships in 15 to 20 working days
Ref
99-15
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