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Ellipsometry for Industrial Applications
Karl Riedling
€ 65.53
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Description for Ellipsometry for Industrial Applications
Paperback. This volume endeavours to point out some of the less obvious features and possibilities of ellipsometry, particularly of dynamic "in situ" measurements, and reviews its applications in research and manufacturing of semiconductor and thin film devices. Num Pages: 112 pages, 49 black & white illustrations. BIC Classification: PDG; PNFS; TTB. Category: (P) Professional & Vocational; (UP) Postgraduate, Research & Scholarly. Dimension: 244 x 170 x 6. Weight in Grams: 240.
During the past years, elliposometry, a non-destructive and contact-less optical surface analysis technique, has gained increased importance in industrial areas, such as the technology of electronic devices, when simple instruments, many of them computer-controlled and automated, became available. The potential users of such instruments are, however, frequently aware neither of the inherent possibilities of this technique, nor of its accuracy limitations. This book endeavors to point out some of the less obvious features and possibilities of ellipsometry, particularly of dynamic "in situ" measurements, and reviews its applications in research and manufacturing of semiconductor and thin film devices. A comprehensive discussion ... Read more
During the past years, elliposometry, a non-destructive and contact-less optical surface analysis technique, has gained increased importance in industrial areas, such as the technology of electronic devices, when simple instruments, many of them computer-controlled and automated, became available. The potential users of such instruments are, however, frequently aware neither of the inherent possibilities of this technique, nor of its accuracy limitations. This book endeavors to point out some of the less obvious features and possibilities of ellipsometry, particularly of dynamic "in situ" measurements, and reviews its applications in research and manufacturing of semiconductor and thin film devices. A comprehensive discussion ... Read more
Product Details
Format
Paperback
Publication date
1987
Publisher
Springer Verlag GmbH Austria
Number of pages
112
Condition
New
Number of Pages
99
Place of Publication
Vienna, Austria
ISBN
9783211820407
SKU
V9783211820407
Shipping Time
Usually ships in 15 to 20 working days
Ref
99-15
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