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Speciality Gas Analysis
Hogan
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Description for Speciality Gas Analysis
Hardcover. The semiconductor industry is moving toward gas-phase reagents, increasing the relative importance of gas purity. Anyone who deals in the manufacturing of these devices needs to understand the technology available for modern gas analysis. Editor(s): Hogan, Jeremiah D. Num Pages: 200 pages, appendices, index. BIC Classification: PHFC; PNF; THFG. Category: (P) Professional & Vocational; (UP) Postgraduate, Research & Scholarly; (UU) Undergraduate. Dimension: 246 x 166 x 18. Weight in Grams: 464.
The semiconductor industry is moving toward gas-phase reagents, increasing the relative importance of gas purity. Anyone who deals in the manufacturing of these devices needs to understand the technology available for modern gas analysis. Most specialty gas vendors have some re in place for quality assurance, but these usually are very simplistic and outdated methods. No book was available that gave guidance on providing accurate, reproducible data on specialty gas products. This is the first book that provides an introduction to current analytical methods and equipment for the analysis of high- purity gases used in the semiconductor industry and related ... Read more
The semiconductor industry is moving toward gas-phase reagents, increasing the relative importance of gas purity. Anyone who deals in the manufacturing of these devices needs to understand the technology available for modern gas analysis. Most specialty gas vendors have some re in place for quality assurance, but these usually are very simplistic and outdated methods. No book was available that gave guidance on providing accurate, reproducible data on specialty gas products. This is the first book that provides an introduction to current analytical methods and equipment for the analysis of high- purity gases used in the semiconductor industry and related ... Read more
Product Details
Format
Hardback
Publication date
1996
Publisher
John Wiley & Sons Inc United States
Number of pages
200
Condition
New
Number of Pages
200
Place of Publication
, United States
ISBN
9780471185987
SKU
V9780471185987
Shipping Time
Usually ships in 7 to 11 working days
Ref
99-50
About Hogan
JEREMIAH D. HOGAN is Director of Physical Analysis Laboratories for Texas Instruments, Inc.
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