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Mechanical Microsensors
Elwenspoek, M.; Wiegerink, R.
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Description for Mechanical Microsensors
Paperback. Series: Microtechnology and MEMS. Num Pages: 295 pages, biography. BIC Classification: TBN; TDPB; TGB; TJF. Category: (P) Professional & Vocational. Dimension: 234 x 156 x 16. Weight in Grams: 474.
This book on mechanical microsensors is based on a course organized by the Swiss Foundation for Research in Microtechnology (FSRM) in Neuchatel, Swit zerland, and developed and taught by the authors. Support by FSRM is herewith gratefully acknowledged. This book attempts to serve two purposes. First it gives an overview on me chanical microsensors (sensors for pressure, force, acceleration, angular rate and fluid flow, realized by silicon micromachining). Second, it serves as a textbook for engineers to give them a comprehensive introduction on the basic design issues of these sensors. Engineers active in sensor design are usually educated either in ... Read more
This book on mechanical microsensors is based on a course organized by the Swiss Foundation for Research in Microtechnology (FSRM) in Neuchatel, Swit zerland, and developed and taught by the authors. Support by FSRM is herewith gratefully acknowledged. This book attempts to serve two purposes. First it gives an overview on me chanical microsensors (sensors for pressure, force, acceleration, angular rate and fluid flow, realized by silicon micromachining). Second, it serves as a textbook for engineers to give them a comprehensive introduction on the basic design issues of these sensors. Engineers active in sensor design are usually educated either in ... Read more
Product Details
Format
Paperback
Publication date
2010
Publisher
Springer-Verlag Berlin and Heidelberg GmbH & Co. KG Germany
Number of pages
295
Condition
New
Series
Microtechnology and MEMS
Number of Pages
295
Place of Publication
Berlin, Germany
ISBN
9783642087066
SKU
V9783642087066
Shipping Time
Usually ships in 15 to 20 working days
Ref
99-15
Reviews for Mechanical Microsensors
"Mechanical Microsensors provides a comprehensive description of the various design techniques required for silicon micromachining of sensors. This is a very well written book which has a pleasant balance of mathematical, physics and engineering principles, that make this book suitable for physicists, chemistry, electrical and mechanical engineers."
SENSOR REVIEW "Of particular value is the fact that the ... Read more
SENSOR REVIEW "Of particular value is the fact that the ... Read more