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Modelling of Microfabrication Systems
Nassar, Raja; Dai, Weizhong
€ 194.08
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Description for Modelling of Microfabrication Systems
Paperback. This is the first book to address modelling of systems that are important to the fabrication of three-dimensional microstructures. It is unique in that it focuses on high aspect ratio microtechnology, ranging from ion beam micromachining to x-ray lithography. Series: Microtechnology and MEMS. Num Pages: 270 pages, biography. BIC Classification: GB; PB; TBN. Category: (P) Professional & Vocational. Dimension: 234 x 156 x 14. Weight in Grams: 433.
This is the first book to address modelling of systems that are important to the fabrication of three-dimensional microstructures. It is unique in that it focuses on high aspect ratio microtechnology, ranging from ion beam micromachining to x-ray lithography.
This is the first book to address modelling of systems that are important to the fabrication of three-dimensional microstructures. It is unique in that it focuses on high aspect ratio microtechnology, ranging from ion beam micromachining to x-ray lithography.
Product Details
Format
Paperback
Publication date
2010
Publisher
Springer-Verlag Berlin and Heidelberg GmbH & Co. KG Germany
Number of pages
270
Condition
New
Series
Microtechnology and MEMS
Number of Pages
270
Place of Publication
Berlin, Germany
ISBN
9783642055362
SKU
V9783642055362
Shipping Time
Usually ships in 15 to 20 working days
Ref
99-15
Reviews for Modelling of Microfabrication Systems
From the reviews: "This book is aimed at people working on simulation and optimization process fabrication of Microelectromechanical Systems (MEMS). … the book provides a fairly complete view of the modeling of microfabrication processes. … ‘It will be invaluable to scientists, engineers, graduate students, and manufacturers engaged in research and development for enhancing the accuracy ... Read more