Handbook of Chemicals and Gases for the Semiconductor Industry
Ashutosh Misra
The first comprehensive guide to the chemicals and gases used in semiconductor manufacturing
The fabrication of semiconductor devices involves a series of complex chemical processes such as photolithography, etching, cleaning, thin film deposition, and polishing. Until now, there has been no convenient source of information on the properties, applications, and health and safety considerations of the chemicals used in these processes. The Handbook of Chemicals and Gases for the Semiconductor Industry meets this need.
Each of the Handbook's eight chapters is related to a specific area of semiconductor processing. The authors provide a brief overview of each step in the ... Read more
The Handbook's eight chapters are:
Thin Film Deposition Materials
Wafer Cleaning Materials
Photolithography Materials
Wet and Dry Etching Materials
Chemical Mechanical Planarizing Methods
Carrier Gases
Uncategorized Materials
Semiconductor Chemicals Analysis
No other single source brings together these useful and important data on chemicals and gases used in the manufacture of semiconductor devices. The Handbook of Chemicals and Gases for the Semiconductor Industry will be a valuable reference for process engineers, scientists, suppliers to the semiconductor industry, microelectronics researchers, and students.
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About Ashutosh Misra
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