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Ashutosh Misra - Handbook of Chemicals and Gases for the Semiconductor Industry - 9780471316718 - V9780471316718
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Handbook of Chemicals and Gases for the Semiconductor Industry

€ 314.45
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Description for Handbook of Chemicals and Gases for the Semiconductor Industry Hardcover. This book brings together the most useful and important data on chemicals and gases used in the manufacture of semiconductor devices. It offers an A-to-Z listing of physical properties and safety information for more than 270 chemicals and gases used in the manufacture of semiconductor chips. Num Pages: 364 pages, Ill. BIC Classification: PNR; TDCC; TJFD5. Category: (G) General (US: Trade); (P) Professional & Vocational; (UP) Postgraduate, Research & Scholarly; (UU) Undergraduate. Dimension: 241 x 180 x 22. Weight in Grams: 644.
The first comprehensive guide to the chemicals and gases used in semiconductor manufacturing

The fabrication of semiconductor devices involves a series of complex chemical processes such as photolithography, etching, cleaning, thin film deposition, and polishing. Until now, there has been no convenient source of information on the properties, applications, and health and safety considerations of the chemicals used in these processes. The Handbook of Chemicals and Gases for the Semiconductor Industry meets this need.

Each of the Handbook's eight chapters is related to a specific area of semiconductor processing. The authors provide a brief overview of each step in the ... Read more

The Handbook's eight chapters are:
Thin Film Deposition Materials
Wafer Cleaning Materials
Photolithography Materials
Wet and Dry Etching Materials
Chemical Mechanical Planarizing Methods
Carrier Gases
Uncategorized Materials
Semiconductor Chemicals Analysis

No other single source brings together these useful and important data on chemicals and gases used in the manufacture of semiconductor devices. The Handbook of Chemicals and Gases for the Semiconductor Industry will be a valuable reference for process engineers, scientists, suppliers to the semiconductor industry, microelectronics researchers, and students.

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Product Details

Format
Hardback
Publication date
2002
Publisher
John Wiley and Sons Ltd United States
Number of pages
364
Condition
New
Number of Pages
384
Place of Publication
, United States
ISBN
9780471316718
SKU
V9780471316718
Shipping Time
Usually ships in 7 to 11 working days
Ref
99-50

About Ashutosh Misra
ASHUTOSH MISRA is Director of Applications and New Product Development for Air Liquide Electronics, Inc. JEREMIAH D. HOGAN is Director of Physical Analysis Laboratories for Texas Instruments, Inc. RUSSELL A. CHORUSH is an associate at the law firm of Conley, Rose and Tayon, PC.

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