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Reactive Sputter Deposition
. Ed(S): Depla, Diederik; Mahieu, Stijn
€ 375.69
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Description for Reactive Sputter Deposition
hardcover. In the family of Physical Vapour Deposition techniques, sputtering is one of the most important. This book describes various aspects of the reactive magnetron sputtering process, from the discharge up to the resulting thin film growth allowing the reader to understand the complete process. Editor(s): Depla, Diederik; Mahieu, Stijn. Series: Springer Series in Materials Science. Num Pages: 590 pages, 37 black & white tables, biography. BIC Classification: TDM. Category: (P) Professional & Vocational. Dimension: 241 x 162 x 45. Weight in Grams: 1134.
The most straightforwardmethod to change the surface properties of a ma- rial is to deposit a thin ?lm or coating on it. Hence, it is not surprising that an overwhelming amount of scienti?c and technical papers is published each year on this topic. Sputter deposition is one of the many so-called physical vapour deposition (PVD) techniques. In most cases, sputter deposition uses a magnetically enhanced glow discharge or magnetron discharge to produce the ions which bombard and sputter the cathode material. In the ?rst chapter of this book (Chap. 1), the details of the sputter process are discussed. Essential to ... Read more
The most straightforwardmethod to change the surface properties of a ma- rial is to deposit a thin ?lm or coating on it. Hence, it is not surprising that an overwhelming amount of scienti?c and technical papers is published each year on this topic. Sputter deposition is one of the many so-called physical vapour deposition (PVD) techniques. In most cases, sputter deposition uses a magnetically enhanced glow discharge or magnetron discharge to produce the ions which bombard and sputter the cathode material. In the ?rst chapter of this book (Chap. 1), the details of the sputter process are discussed. Essential to ... Read more
Product Details
Format
Hardback
Publication date
2008
Publisher
Springer Germany
Number of pages
590
Condition
New
Series
Springer Series in Materials Science
Number of Pages
572
Place of Publication
Berlin, Germany
ISBN
9783540766629
SKU
V9783540766629
Shipping Time
Usually ships in 15 to 20 working days
Ref
99-15
About . Ed(S): Depla, Diederik; Mahieu, Stijn
Prof. Dr. D. Depla has received his Master Degree in Chemistry in 1991 at Ghent University (Belgium). In 1996 he promoted with a PhD thesis on Solid State Chemistry. After a short period as senior scientist in the Department for Solid State Sciences, he became in 1999 Professor at the Department for Solid State Sciences where his research focussed on ... Read more
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