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Low Pressure Plasmas and Microstructuring Technology
Gerhard Franz
€ 253.85
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Description for Low Pressure Plasmas and Microstructuring Technology
Paperback. This monograph presents an up-to-date perspective on gas discharge physics and its applications to various industries. It starts with an overview of the types of plasmas and puts particular emphasis on the microscopic mechanisms of reactive processes. Num Pages: 732 pages, 422 black & white illustrations, 25 black & white tables, biography. BIC Classification: PHN; TGM; TTB. Category: (P) Professional & Vocational. Dimension: 234 x 156 x 38. Weight in Grams: 1139.
Over the last forty years, plasma supported processes have attracted ever - creasing interest, and now, all modern semiconductor devices undergo at least one plasma-involved processing step, starting from surface cleaning via coating to etching. In total, the range of the treated substrates covers some orders of magnitude: Trenches and linewidths of commercially available devices have - ready passed the boundary of 100 nm, decorative surface treatment will happen 2 in the mm range, and the upper limit is reached with surface protecting layers of windows which are coated with ?/4 layers against IR radiation. The rapid development of the ... Read more
Over the last forty years, plasma supported processes have attracted ever - creasing interest, and now, all modern semiconductor devices undergo at least one plasma-involved processing step, starting from surface cleaning via coating to etching. In total, the range of the treated substrates covers some orders of magnitude: Trenches and linewidths of commercially available devices have - ready passed the boundary of 100 nm, decorative surface treatment will happen 2 in the mm range, and the upper limit is reached with surface protecting layers of windows which are coated with ?/4 layers against IR radiation. The rapid development of the ... Read more
Product Details
Format
Paperback
Publication date
2010
Publisher
Springer-Verlag Berlin and Heidelberg GmbH & Co. KG Germany
Number of pages
732
Condition
New
Number of Pages
732
Place of Publication
Berlin, Germany
ISBN
9783642099397
SKU
V9783642099397
Shipping Time
Usually ships in 15 to 20 working days
Ref
99-15
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