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CMOS Cantilever Sensor Systems
Lange, D.; Brand, O.; Baltes, H.
€ 119.13
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Description for CMOS Cantilever Sensor Systems
Paperback. Series: Microtechnology and MEMS. Num Pages: 142 pages, biography. BIC Classification: PHV; TBN. Category: (P) Professional & Vocational. Dimension: 234 x 156 x 8. Weight in Grams: 248.
This book is intended for scientists and engineers in the field of micro- and nano electro-mechanical systems (MEMS and NEMS) and introduces the development of cantilever-based sensor systems using CMOS-compatible micromachining from the design concepts and simulations to the prototype. It is also a useful resource for researchers on cantilever sensors and resonant sensors in general The reader will become familiar with the potential of the combination of two technological approaches: IC fabrication technology, notably CMOS technology, and silicon micromachining and the resulting microstructures such as cantilever beams. It was recognized early that these two technologies should be merged in ... Read more
This book is intended for scientists and engineers in the field of micro- and nano electro-mechanical systems (MEMS and NEMS) and introduces the development of cantilever-based sensor systems using CMOS-compatible micromachining from the design concepts and simulations to the prototype. It is also a useful resource for researchers on cantilever sensors and resonant sensors in general The reader will become familiar with the potential of the combination of two technological approaches: IC fabrication technology, notably CMOS technology, and silicon micromachining and the resulting microstructures such as cantilever beams. It was recognized early that these two technologies should be merged in ... Read more
Product Details
Format
Paperback
Publication date
2010
Publisher
Springer-Verlag Berlin and Heidelberg GmbH & Co. KG Germany
Number of pages
142
Condition
New
Series
Microtechnology and MEMS
Number of Pages
142
Place of Publication
Berlin, Germany
ISBN
9783642077289
SKU
V9783642077289
Shipping Time
Usually ships in 15 to 20 working days
Ref
99-15
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