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Crucial Issues in Semiconductor Materials and Processing Technology
. Ed(S): Coffa, S.; Priolo, Francesco; Rimini, Emanuele; Poate, J. M. (A&T Bell Laboratories, Murray Hill, New Jersey, Usa)
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Description for Crucial Issues in Semiconductor Materials and Processing Technology
Hardback. Proceedings of the NATO Advanced Study Institute on Semiconductor Materials and Processing Technologies, Erice, Italy, July 1-13, 1991 Editor(s): Coffa, S.; Priolo, Francesco; Rimini, Emanuele; Poate, J. M. (A&T Bell Laboratories, Murray Hill, New Jersey, USA). Series: NATO Science Series E:. Num Pages: 557 pages, biography. BIC Classification: TJFC; TJFD5. Category: (P) Professional & Vocational; (UP) Postgraduate, Research & Scholarly. Dimension: 235 x 155 x 31. Weight in Grams: 962.
Semiconductors lie at the heart of some of the most important industries and technologies of the twentieth century. The complexity of silicon integrated circuits is increasing considerably because of the continuous dimensional shrinkage to improve efficiency and functionality. This evolution in design rules poses real challenges for the materials scientists and processing engineers. Materials, defects and processing now have to be understood in their totality. World experts discuss, in this volume, the crucial issues facing lithography, ion implication and plasma processing, metallization and insulating layer quality, and crystal growth. Particular emphasis ... Read more
Semiconductors lie at the heart of some of the most important industries and technologies of the twentieth century. The complexity of silicon integrated circuits is increasing considerably because of the continuous dimensional shrinkage to improve efficiency and functionality. This evolution in design rules poses real challenges for the materials scientists and processing engineers. Materials, defects and processing now have to be understood in their totality. World experts discuss, in this volume, the crucial issues facing lithography, ion implication and plasma processing, metallization and insulating layer quality, and crystal growth. Particular emphasis ... Read more
Product Details
Format
Hardback
Publication date
1992
Publisher
Kluwer Academic Publishers United States
Number of pages
557
Condition
New
Series
NATO Science Series E:
Number of Pages
538
Place of Publication
Dordrecht, Netherlands
ISBN
9780792320036
SKU
V9780792320036
Shipping Time
Usually ships in 15 to 20 working days
Ref
99-15
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