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Electroceramic Based Mems
Nava . Ed(S): Setter
€ 247.02
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Description for Electroceramic Based Mems
Hardback. Focuses on the use of functional oxide and nitride thin films to increase functionality and application range of MEMS (microelectromechanical systems), including micro-sensors, micro-actuators, and electronic components for high frequency communications. Editor(s): Setter, Nava. Series: Electronic Materials: Science and Technology. Num Pages: 414 pages, biography. BIC Classification: TJF. Category: (P) Professional & Vocational; (UP) Postgraduate, Research & Scholarly; (UU) Undergraduate. Dimension: 234 x 156 x 23. Weight in Grams: 774.
The concept of micromachining of silicon to form micron-scale structures such as cantilevers, free-standing bridges, membranes, and channels and its combination with microelectronics fabrication methodology and technology has resulted in the em- gence of a new category of functional systems called MEMS (microelectomechanical systems). MEMS are miniature systems containing devices or arrays of devices that combine electronics with other components such as sensors, transducers and actuators, and are fabricated by IC (Integrated Circuits) batch processing techniques. The ?eld of electroceramics (inorganic, non-metallic materials, often polycr- talline, with useful electrical and other functional properties) provides a vast number of active materials ... Read more
The concept of micromachining of silicon to form micron-scale structures such as cantilevers, free-standing bridges, membranes, and channels and its combination with microelectronics fabrication methodology and technology has resulted in the em- gence of a new category of functional systems called MEMS (microelectomechanical systems). MEMS are miniature systems containing devices or arrays of devices that combine electronics with other components such as sensors, transducers and actuators, and are fabricated by IC (Integrated Circuits) batch processing techniques. The ?eld of electroceramics (inorganic, non-metallic materials, often polycr- talline, with useful electrical and other functional properties) provides a vast number of active materials ... Read more
Product Details
Format
Hardback
Publication date
2005
Publisher
Springer-Verlag New York Inc. United States
Number of pages
414
Condition
New
Series
Electronic Materials: Science and Technology
Number of Pages
414
Place of Publication
New York, NY, United States
ISBN
9780387233109
SKU
V9780387233109
Shipping Time
Usually ships in 15 to 20 working days
Ref
99-15
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