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Borophosphosilicate Glass Thin Films in Electronics
Vasilyev V.Y.
€ 248.18
€ 168.92
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Description for Borophosphosilicate Glass Thin Films in Electronics
Hardback. Editor(s): Vasilyev, Vladislav Yu. Num Pages: 222 pages, illustrations. BIC Classification: TJFD5. Category: (P) Professional & Vocational; (UP) Postgraduate, Research & Scholarly. Dimension: 185 x 259 x 19. Weight in Grams: 636.
This comprehensive monograph summarises the 30-year studies of borophosphosilicate glass (BPSG) thin film used in electronic technologies, including the authors personal experience with the film deposition, characterisation, and implementation in microelectronic technology. The main core of the monograph is the interrelation of chemical vapour deposition (CVD) kinetic features, thin film material properties, and electronic device technology aspects. Part one of the monograph is devoted to the analysis of thin film synthesis, such as: CVD methodology and BPSG film processes, silicon dioxide and glass film growth kinetics, CVD step coverage and gap-fill features. Part two of the book is a description ... Read more
This comprehensive monograph summarises the 30-year studies of borophosphosilicate glass (BPSG) thin film used in electronic technologies, including the authors personal experience with the film deposition, characterisation, and implementation in microelectronic technology. The main core of the monograph is the interrelation of chemical vapour deposition (CVD) kinetic features, thin film material properties, and electronic device technology aspects. Part one of the monograph is devoted to the analysis of thin film synthesis, such as: CVD methodology and BPSG film processes, silicon dioxide and glass film growth kinetics, CVD step coverage and gap-fill features. Part two of the book is a description ... Read more
Product Details
Publisher
Nova Science Publishers Inc United States
Number of pages
222
Format
Hardback
Publication date
2013
Condition
New
Number of Pages
222
Place of Publication
New York, United States
ISBN
9781624179594
SKU
V9781624179594
Shipping Time
Usually ships in 5 to 9 working days
Ref
99-1
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