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Handbook of 3D Integration, Volume 3: 3D Process Technology
Garrou
€ 169.49
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Description for Handbook of 3D Integration, Volume 3: 3D Process Technology
Hardback. Edited by key figures in the field and written by top authors from academia and industry, this book covers the intricate details of 3D process technology from both a technological and a materials science perspective. Editor(s): Garrou, Philip E.; Koyanagi, Mitsumasa; Ramm, Peter. Num Pages: 474 pages, illustrations (black and white, and colour). BIC Classification: TGM; TJFC; TJFD5. Category: (P) Professional & Vocational. Dimension: 251 x 176 x 29. Weight in Grams: 1168.
Edited by key figures in 3D integration and written by top authors from high-tech companies and renowned research institutions, this book covers the intricate details of 3D process technology. As such, the main focus is on silicon via formation, bonding and debonding, thinning, via reveal and backside processing, both from a technological and a materials science perspective. The last part of the book is concerned with assessing and enhancing the reliability of the 3D integrated devices, which is a prerequisite for the large-scale implementation of this emerging technology.
Invaluable reading for materials scientists, semiconductor physicists, and those working in ... Read more
Edited by key figures in 3D integration and written by top authors from high-tech companies and renowned research institutions, this book covers the intricate details of 3D process technology. As such, the main focus is on silicon via formation, bonding and debonding, thinning, via reveal and backside processing, both from a technological and a materials science perspective. The last part of the book is concerned with assessing and enhancing the reliability of the 3D integrated devices, which is a prerequisite for the large-scale implementation of this emerging technology.
Invaluable reading for materials scientists, semiconductor physicists, and those working in ... Read more
Product Details
Format
Hardback
Publication date
2014
Publisher
Wiley-VCH Verlag GmbH Germany
Number of pages
474
Condition
New
Number of Pages
474
Place of Publication
Berlin, Germany
ISBN
9783527334667
SKU
V9783527334667
Shipping Time
Usually ships in 4 to 8 working days
Ref
99-1
About Garrou
Philip Garrou is a consultant and expert witness in the field of IC packaging materials and applications, prior to which he was Dir. of Technology and Business Dev. for Dow Chemicals' Electronic Materials business. Dr. Garrou is a Fellow of IEEE and IMAPS and served as President of the IEEE CPMT Society and IMAPS. He has co-authored 3 microelectronics texts ... Read more
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