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Handbook of Advanced Semiconductor Technology and Computer Systems
Guy Rabbat
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Description for Handbook of Advanced Semiconductor Technology and Computer Systems
Paperback. Series: Van Nostrand Reinhold Electrical/Computer Science and Engineering Series. Num Pages: 960 pages, 202 black & white illustrations, biography. BIC Classification: TJFD5. Category: (P) Professional & Vocational. Dimension: 235 x 155 x 48. Weight in Grams: 1442.
Chapter I describes deposition as a basic microelectronics technique. Plasma enhanced chemical vapor deposition (PECVD) is a technique widely accepted in microelectronics for the deposition of amorphous dielectric films such as silicon nitride and silicon oxide. The main advantage of PECVD stems from the intro duction of plasma energy to the CVD environment, which makes it possible to promote chemical reactions at relatively low temperatures. A natural extension of this is to use this plasma energy to lower the temperature required to obtain a crystalline deposit. This chapter discusses the PECVD technique and its ap plication to the deposition of ... Read more
Chapter I describes deposition as a basic microelectronics technique. Plasma enhanced chemical vapor deposition (PECVD) is a technique widely accepted in microelectronics for the deposition of amorphous dielectric films such as silicon nitride and silicon oxide. The main advantage of PECVD stems from the intro duction of plasma energy to the CVD environment, which makes it possible to promote chemical reactions at relatively low temperatures. A natural extension of this is to use this plasma energy to lower the temperature required to obtain a crystalline deposit. This chapter discusses the PECVD technique and its ap plication to the deposition of ... Read more
Product Details
Format
Paperback
Publication date
2012
Publisher
Springer Netherlands
Number of pages
960
Condition
New
Series
Van Nostrand Reinhold Electrical/Computer Science and Engineering Series
Number of Pages
942
Place of Publication
Dordrecht, Netherlands
ISBN
9789401170581
SKU
V9789401170581
Shipping Time
Usually ships in 15 to 20 working days
Ref
99-15
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