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Microelectronic Materials and Processes (Nato Science Series E:)
R. A. Levy (Ed.)
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Description for Microelectronic Materials and Processes (Nato Science Series E:)
Paperback. Proceedings of the NATO Advanced Study Institute, Il Ciocco, Castelvecchio Pascoli, Italy, June 30-July 11, 1986 Editor(s): Levy, R. A. Series: NATO Science Series E:. Num Pages: 1000 pages, biography. BIC Classification: TJFD5. Category: (P) Professional & Vocational; (UP) Postgraduate, Research & Scholarly. Dimension: 235 x 155 x 49. Weight in Grams: 1502.
The primary thrust of very large scale integration (VLS!) is the miniaturization of devices to increase packing density, achieve higher speed, and consume lower power. The fabrication of integrated circuits containing in excess of four million components per chip with design rules in the submicron range has now been made possible by the introduction of innovative circuit designs and the development of new microelectronic materials and processes. This book addresses the latter challenge by assessing the current status of the science and technology associated with the production of VLSI silicon circuits. It represents the cumulative effort of experts from academia ... Read more
The primary thrust of very large scale integration (VLS!) is the miniaturization of devices to increase packing density, achieve higher speed, and consume lower power. The fabrication of integrated circuits containing in excess of four million components per chip with design rules in the submicron range has now been made possible by the introduction of innovative circuit designs and the development of new microelectronic materials and processes. This book addresses the latter challenge by assessing the current status of the science and technology associated with the production of VLSI silicon circuits. It represents the cumulative effort of experts from academia ... Read more
Product Details
Publisher
Springer
Format
Paperback
Publication date
1989
Series
NATO Science Series E:
Condition
New
Number of Pages
1000
Place of Publication
Dordrecht, Netherlands
ISBN
9780792301547
SKU
V9780792301547
Shipping Time
Usually ships in 15 to 20 working days
Ref
99-15
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