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Progress in SOI Structures and Devices Operating at Extreme Conditions
. Ed(S): Balestra, Francis; Nazarov, Alexei N. (National Academy Of Science Of Ukraine); Lysenko, Vladimir S.
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Description for Progress in SOI Structures and Devices Operating at Extreme Conditions
Paperback. Proceedings of the NATO Advanced Research Workshop, held in Kyiv, Ukraine, October 15-20, 2000 Editor(s): Balestra, Francis; Nazarov, Alexei N. (National Academy of Science of Ukraine); Lysenko, Vladimir S. Series: NATO Science Series II. Num Pages: 351 pages, biography. BIC Classification: TJFC; TJFD5. Category: (P) Professional & Vocational; (UP) Postgraduate, Research & Scholarly. Dimension: 240 x 160 x 19. Weight in Grams: 516.
A review of the electrical properties, performance and physical mechanisms of the main silicon-on-insulator (SOI) materials and devices. Particular attention is paid to the reliability of SOI structures operating in harsh conditions. The first part of the book deals with material technology and describes the SIMOX and ELTRAN technologies, the smart-cut technique, SiCOI structures and MBE growth. The second part covers reliability of devices operating under extreme conditions, with an examination of low and high temperature operation of deep submicron MOSFETs and novel SOI technologies and circuits, SOI in harsh environments and the properties of the buried oxide. The third ... Read more
A review of the electrical properties, performance and physical mechanisms of the main silicon-on-insulator (SOI) materials and devices. Particular attention is paid to the reliability of SOI structures operating in harsh conditions. The first part of the book deals with material technology and describes the SIMOX and ELTRAN technologies, the smart-cut technique, SiCOI structures and MBE growth. The second part covers reliability of devices operating under extreme conditions, with an examination of low and high temperature operation of deep submicron MOSFETs and novel SOI technologies and circuits, SOI in harsh environments and the properties of the buried oxide. The third ... Read more
Product Details
Format
Paperback
Publication date
2002
Publisher
Kluwer Academic Publishers United States
Number of pages
351
Condition
New
Series
NATO Science Series II
Number of Pages
351
Place of Publication
New York, NY, United States
ISBN
9781402005763
SKU
V9781402005763
Shipping Time
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Ref
99-15
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