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Scanning Probe Lithography
Soh, Hyongsok T.; Guarini, Kathryn Wilder; Quate, Calvin F. (Stanford University, California, Usa)
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Description for Scanning Probe Lithography
Paperback. Series: Microsystems. Num Pages: 197 pages, biography. BIC Classification: TDP; TGMT; TJFC; TJFD. Category: (P) Professional & Vocational. Dimension: 234 x 156 x 12. Weight in Grams: 321.
Scanning Probe Lithography (SPL) describes recent advances in the field of scanning probe lithography, a high resolution patterning technique that uses a sharp tip in close proximity to a sample to pattern nanometer-scale features on the sample. SPL is capable of patterning sub-30nm features with nanometer-scale alignment registration. It is a relatively simple, inexpensive, reliable method for patterning nanometer-scale features on various substrates. It has potential applications for nanometer-scale research, for maskless semiconductor lithography, and for photomask patterning.
The authors of this book have been key players in this ... Read more
Scanning Probe Lithography (SPL) describes recent advances in the field of scanning probe lithography, a high resolution patterning technique that uses a sharp tip in close proximity to a sample to pattern nanometer-scale features on the sample. SPL is capable of patterning sub-30nm features with nanometer-scale alignment registration. It is a relatively simple, inexpensive, reliable method for patterning nanometer-scale features on various substrates. It has potential applications for nanometer-scale research, for maskless semiconductor lithography, and for photomask patterning.
The authors of this book have been key players in this ... Read more
Product Details
Format
Paperback
Publication date
2010
Publisher
Springer-Verlag New York Inc. United States
Number of pages
197
Condition
New
Series
Microsystems
Number of Pages
197
Place of Publication
New York, NY, United States
ISBN
9781441948946
SKU
V9781441948946
Shipping Time
Usually ships in 15 to 20 working days
Ref
99-15
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