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ULSI Semiconductor Technology Atlas
Chih-Hang Tung
€ 259.90
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Description for ULSI Semiconductor Technology Atlas
Hardcover. Ultra Large Scale Integration (ULSI) refers to chips with more than 10,000,000 devices per chip. It is the natural outgrowth of VLSI (Very Large Scale Integration). ULSI Semiconductor Technology Atlas uses TEM (Transmission Electron Microscopy) micrographs to explain and illustrate ULSI process technologies and associated problems. Num Pages: 666 pages, Illustrations. BIC Classification: TJFD5. Category: (P) Professional & Vocational. Dimension: 189 x 264 x 46. Weight in Grams: 1434.
More than 1,100 TEM images illustrate the science of ULSI
The natural outgrowth of VLSI (Very Large Scale Integration), Ultra Large Scale Integration (ULSI) refers to semiconductor chips with more than 10 million devices per chip. Written by three renowned pioneers in their field, ULSI Semiconductor Technology Atlas uses examples and TEM (Transmission Electron Microscopy) micrographs to explain and illustrate ULSI process technologies and their associated problems.
The first book available on the subject to be illustrated using TEM images, ULSI Semiconductor Technology Atlas is logically divided into four parts:
* Part I ... Read more
More than 1,100 TEM images illustrate the science of ULSI
The natural outgrowth of VLSI (Very Large Scale Integration), Ultra Large Scale Integration (ULSI) refers to semiconductor chips with more than 10 million devices per chip. Written by three renowned pioneers in their field, ULSI Semiconductor Technology Atlas uses examples and TEM (Transmission Electron Microscopy) micrographs to explain and illustrate ULSI process technologies and their associated problems.
The first book available on the subject to be illustrated using TEM images, ULSI Semiconductor Technology Atlas is logically divided into four parts:
* Part I ... Read more
Product Details
Format
Hardback
Publication date
2003
Publisher
John Wiley and Sons Ltd United States
Number of pages
666
Condition
New
Number of Pages
680
Place of Publication
, United States
ISBN
9780471457725
SKU
V9780471457725
Shipping Time
Usually ships in 7 to 11 working days
Ref
99-50
About Chih-Hang Tung
CHIH-HANG TUNG is a senior member of the technical staff and Project Leader at the Institute of Microelectronics in Singapore. GEORGE T. T. SHENG was the first to develop cross-sectioning samples of TEM studies of semiconductor devices and has been involved with many other groundbreaking projects at Bell Labs. CHIH-YUAN LU is Chairman and CEO of Ardentec Corp., ... Read more
Reviews for ULSI Semiconductor Technology Atlas
"...provides a historical introduction to the technology as well as coverage of the evolution of basic ULSI process problems and issue." (IEEE Solid-State Circuits Society Newsletter, January 2004) "…strongly recommended…" (E-Streams, Vol. 7, No. 4)