Understanding MEMS
Luis Castaner
The continued advancement of MEMS (micro-electro-mechanical systems) complexity, performance, commercial exploitation and market size requires an ever-expanding graduate population with state-of-the-art expertise.
Understanding MEMS: Principles and Applications provides a comprehensive introduction to this complex and multidisciplinary technology that is accessible to senior undergraduate and graduate students from a range of engineering and physical sciences backgrounds.
Fully self-contained, this textbook is designed to help students grasp the key principles and operation of MEMS devices and to inspire advanced study or a career in this field.
Moreover, with the increasing application areas, product categories and functionality of MEMS, industry professionals will also ... Read more
Key features:
- Details the fundamentals of MEMS, enabling readers to understand the basic governing equations and know how they apply at the micron scale.
- Strong pedagogical emphasis enabling students to understand the fundamentals of MEMS devices.
- Self-contained study aid featuring problems and solutions.
- Book companion website hosts Matlab and PSpice codes and viewgraphs.
Product Details
About Luis Castaner
Reviews for Understanding MEMS