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EUV Lithography
Vivek Bakshi
€ 148.35
FREE Delivery in Ireland
Description for EUV Lithography
Hardcover. EUVL is an area of intense research and this book provides the foundation required for understanding and applying this technology. It offers contributions from the world's leading EUVL researchers, and provides all the critical information needed by practitioners and those wanting to enter the field. Num Pages: 700 pages, illustrations. BIC Classification: TG; TJ. Category: (P) Professional & Vocational. Dimension: 259 x 191 x 45. Weight in Grams: 1582.
EUVL is an area of intense research and this book provides the foundation required for understanding and applying this technology. It offers contributions from the world's leading EUVL researchers, and provides all the critical information needed by practitioners and those wanting to enter the field.
EUVL is an area of intense research and this book provides the foundation required for understanding and applying this technology. It offers contributions from the world's leading EUVL researchers, and provides all the critical information needed by practitioners and those wanting to enter the field.
Product Details
Publisher
John Wiley & Sons Inc United Kingdom
Number of pages
700
Format
Hardback
Publication date
2009
Condition
New
Number of Pages
702
Place of Publication
New York, United States
ISBN
9780470471555
SKU
V9780470471555
Shipping Time
Usually ships in 7 to 11 working days
Ref
99-50
About Vivek Bakshi
Vivek Bakshi is the President of EUV Litho, Inc. He was previously a senior member of the technical staff of Sematech, Inc. Dr. Bakshi studied at the University of Texas at Austin; the University of Idaho; and the Indian Institute of Technology at Kanpur.
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