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Ultraclean Surface Processing of Silicon Wafers
Takeshi . Ed(S): Hattori
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Description for Ultraclean Surface Processing of Silicon Wafers
Paperback. Editor(s): Hattori, Takeshi. Translator(s): Hattori, Takishi; Heusler, S.; Webb, J.P. Num Pages: 616 pages, biography. BIC Classification: PHFC; TJFD. Category: (P) Professional & Vocational. Dimension: 229 x 152 x 36. Weight in Grams: 979.
A totally new concept for clean surface processing of Si wafers is introduced in this book. Some fifty distinguished researchers and engineers from the leading Japanese semiconductor companies, such as NEC, Hitachi, Toshiba, Sony and Panasonic as well as from several universities reveal to us for the first time the secrets of these highly productive institutions. They describe the techniques and equipment necessary for the preparation of clean high-quality semiconductor surfaces as a first step in high-yield/high-quality device production. This book thus opens the door to the manufacturing of reliable nanoscale devices and will be extremely useful for every engineer, ... Read more
A totally new concept for clean surface processing of Si wafers is introduced in this book. Some fifty distinguished researchers and engineers from the leading Japanese semiconductor companies, such as NEC, Hitachi, Toshiba, Sony and Panasonic as well as from several universities reveal to us for the first time the secrets of these highly productive institutions. They describe the techniques and equipment necessary for the preparation of clean high-quality semiconductor surfaces as a first step in high-yield/high-quality device production. This book thus opens the door to the manufacturing of reliable nanoscale devices and will be extremely useful for every engineer, ... Read more
Product Details
Format
Paperback
Publication date
2010
Publisher
Springer-Verlag Berlin and Heidelberg GmbH & Co. KG Germany
Number of pages
616
Condition
New
Number of Pages
616
Place of Publication
Berlin, Germany
ISBN
9783642082726
SKU
V9783642082726
Shipping Time
Usually ships in 15 to 20 working days
Ref
99-15
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