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Silicon Nitride for Microelectronic Applications
John T. Milek
€ 118.71
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Description for Silicon Nitride for Microelectronic Applications
Paperback. Num Pages: 118 pages, 2 black & white illustrations. BIC Classification: THR. Category: (G) General (US: Trade). Dimension: 279 x 210 x 6. Weight in Grams: 333.
The large amount of literature on the technology of thin film silicon nitride indi cates the interest of the Department of Defense, NASA and the semiconductor industry in the development and full utilization of the material. This survey is concerned only with the thin film characteristics and properties of silicon nitride as currently utilized by the semiconductor or microelectronics industry. It also includes the various methods of preparation. Applications in microelectronic devices and circuits are to be provided in Part 2 of the survey. Some bulk silicon nitride property data is included for basic reference and comparison purposes. The survey ... Read more
The large amount of literature on the technology of thin film silicon nitride indi cates the interest of the Department of Defense, NASA and the semiconductor industry in the development and full utilization of the material. This survey is concerned only with the thin film characteristics and properties of silicon nitride as currently utilized by the semiconductor or microelectronics industry. It also includes the various methods of preparation. Applications in microelectronic devices and circuits are to be provided in Part 2 of the survey. Some bulk silicon nitride property data is included for basic reference and comparison purposes. The survey ... Read more
Product Details
Format
Paperback
Publication date
1971
Publisher
Springer-Verlag New York Inc. United States
Number of pages
118
Condition
New
Number of Pages
118
Place of Publication
New York, NY, United States
ISBN
9781468461640
SKU
V9781468461640
Shipping Time
Usually ships in 15 to 20 working days
Ref
99-15
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