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Ferroelectric Dielectrics Integrated on Silicon
Emmanuel Defa
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Description for Ferroelectric Dielectrics Integrated on Silicon
Hardback. This book describes up-to-date technology applied to high-K materials for More Than Moore applications, i.e. microsystems applied to microelectronics core technologies. After detailing the basic thermodynamic theory applied to high-K dielectrics thin films including extrinsic effects, this book emphasizes the specificity of thin films. Editor(s): Defay, Emmanuel. Num Pages: 462 pages, Illustrations. BIC Classification: TJFD5. Category: (G) General (US: Trade). Dimension: 239 x 160 x 30. Weight in Grams: 804.
This book describes up-to-date technology applied to high-K materials for More Than Moore applications, i.e. microsystems applied to microelectronics core technologies.
After detailing the basic thermodynamic theory applied to high-K dielectrics thin films including extrinsic effects, this book emphasizes the specificity of thin films. Deposition and patterning technologies are then presented. A whole chapter is dedicated to the major role played in the field by X-Ray Diffraction characterization, and other characterization techniques are also described such as Radio frequency characterization. An in-depth study of the influence of leakage currents is performed together with reliability discussion. Three applicative chapters cover ... Read more
This book describes up-to-date technology applied to high-K materials for More Than Moore applications, i.e. microsystems applied to microelectronics core technologies.
After detailing the basic thermodynamic theory applied to high-K dielectrics thin films including extrinsic effects, this book emphasizes the specificity of thin films. Deposition and patterning technologies are then presented. A whole chapter is dedicated to the major role played in the field by X-Ray Diffraction characterization, and other characterization techniques are also described such as Radio frequency characterization. An in-depth study of the influence of leakage currents is performed together with reliability discussion. Three applicative chapters cover ... Read more
Product Details
Format
Hardback
Publication date
2011
Publisher
ISTE Ltd and John Wiley & Sons Inc United Kingdom
Number of pages
448
Condition
New
Number of Pages
448
Place of Publication
London, United Kingdom
ISBN
9781848213135
SKU
V9781848213135
Shipping Time
Usually ships in 15 to 20 working days
Ref
99-15
About Emmanuel Defa
Emmanuel Defaÿ has been involved at CEA LETI Minatec in piezoelectric and High-K dielectrics for 15 years. He has published 70 scientific papers, one book on piezoelectrics and worked with several top level microelectronics manufacturers (IBM, Freescale, ST). He is currently a lecturer at Ecole Centrale Paris and By-Fellow of Churchill College, Cambridge University, UK.
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