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Fundamental Electron Interactions with Plasma Processing Gases
Christophorou, Loucas G.; Olthoff, James Kenneth
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Description for Fundamental Electron Interactions with Plasma Processing Gases
Paperback. Series: Physics of Atoms and Molecules. Num Pages: 796 pages, biography. BIC Classification: PHM; PHN; PNR. Category: (P) Professional & Vocational. Dimension: 234 x 156 x 40. Weight in Grams: 1205.
This volume deals with the basic knowledge and understanding of fundamental interactions of low energy electrons with molecules. It pro vides an up-to-date and comprehensive account of the fundamental in teractions of low-energy electrons with molecules of current interest in modern technology, especially the semiconductor industry. The primary electron-molecule interaction processes of elastic and in elastic electron scattering, electron-impact ionization, electron-impact dissociation, and electron attachment are discussed, and state-of-the art authoritative data on the cross sections of these processes as well as on rate and transport coefficients are provided. This fundamental knowledge has been obtained by us over the last ... Read more
This volume deals with the basic knowledge and understanding of fundamental interactions of low energy electrons with molecules. It pro vides an up-to-date and comprehensive account of the fundamental in teractions of low-energy electrons with molecules of current interest in modern technology, especially the semiconductor industry. The primary electron-molecule interaction processes of elastic and in elastic electron scattering, electron-impact ionization, electron-impact dissociation, and electron attachment are discussed, and state-of-the art authoritative data on the cross sections of these processes as well as on rate and transport coefficients are provided. This fundamental knowledge has been obtained by us over the last ... Read more
Product Details
Format
Paperback
Publication date
2012
Publisher
Springer-Verlag New York Inc. United States
Number of pages
796
Condition
New
Series
Physics of Atoms and Molecules
Number of Pages
781
Place of Publication
New York, NY, United States
ISBN
9781461347415
SKU
V9781461347415
Shipping Time
Usually ships in 15 to 20 working days
Ref
99-15
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