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Growth and Transport in Nanostructured Materials: Reactive Transport in PVD, CVD, and ALD (SpringerBriefs in Materials)
Angel Yanguas-Gil
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Description for Growth and Transport in Nanostructured Materials: Reactive Transport in PVD, CVD, and ALD (SpringerBriefs in Materials)
Paperback. Series: SpringerBriefs in Materials. Num Pages: 100 pages, 25 black & white illustrations, biography. BIC Classification: PHFC; TBN; TGM; THRH; TJFD5. Category: (P) Professional & Vocational. Dimension: 235 x 155. .
This book will address the application of gas phase thin film methods, including techniques such as evaporation, sputtering, CVD, and ALD to the synthesis of materials on nanostructured and high aspect-ratio high surface area materials. We have chosen to introduce these topics and the different application fields from a chronological perspective: we start with the early concepts of step coverage and later conformality in semiconductor manufacturing, and how later on the range of application branched out to include others such as energy storage, catalysis, and more broadly nanomaterials synthesis.
The book will describe the ballistic and continuum descriptions of ... Read more
This book will address the application of gas phase thin film methods, including techniques such as evaporation, sputtering, CVD, and ALD to the synthesis of materials on nanostructured and high aspect-ratio high surface area materials. We have chosen to introduce these topics and the different application fields from a chronological perspective: we start with the early concepts of step coverage and later conformality in semiconductor manufacturing, and how later on the range of application branched out to include others such as energy storage, catalysis, and more broadly nanomaterials synthesis.
The book will describe the ballistic and continuum descriptions of ... Read more
Product Details
Format
Paperback
Publication date
2016
Publisher
Springer
Condition
New
Series
SpringerBriefs in Materials
Number of Pages
128
Place of Publication
Cham, Switzerland
ISBN
9783319246703
SKU
V9783319246703
Shipping Time
Usually ships in 15 to 20 working days
Ref
99-15
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