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Hornung, Mark R.; Brand, Oliver - Micromachined Ultrasound-based Proximity Sensors - 9780792385080 - V9780792385080
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Micromachined Ultrasound-based Proximity Sensors

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Description for Micromachined Ultrasound-based Proximity Sensors Hardback. Presents a packaged ultrasound microsystem for object detection and distance metering based on micromachined silicon transducer elements. This title describes the characterization, optimization and the long-term stability of silicon membrane resonators as well as appropriate packaging for ultrasound microsystems. Series: Microsystems. Num Pages: 121 pages, biography. BIC Classification: TDPB; TJFD. Category: (P) Professional & Vocational. Dimension: 234 x 156 x 9. Weight in Grams: 830.
Micromachined Ultrasound-Based Proximity Sensors presents a packaged ultrasound microsystem for object detection and distance metering based on micromachined silicon transducer elements. It describes the characterization, optimization and the long-term stability of silicon membrane resonators as well as appropriate packaging for ultrasound microsystems.
Micromachined Ultrasound-Based Proximity Sensors describes a cost-effective approach to the realization of a micro electro mechanical system (MEMS). The micromachined silicon transducer elements were fabricated using industrial IC technology combined with standard silicon micromachining techniques. Additionally, this approach allows the cointegration of the driving and ... Read more

Product Details

Format
Hardback
Publication date
1999
Publisher
Kluwer Academic Publishers United States
Number of pages
121
Condition
New
Series
Microsystems
Number of Pages
121
Place of Publication
Dordrecht, Netherlands
ISBN
9780792385080
SKU
V9780792385080
Shipping Time
Usually ships in 15 to 20 working days
Ref
99-15

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