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Ion Implantation: Equipment and Techniques
. Ed(S): Ryssel, Heiner; Glawischnig, H.
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Description for Ion Implantation: Equipment and Techniques
Paperback. Editor(s): Ryssel, Heiner; Glawischnig, H. Series: Springer Series in Electronics and Photonics. Num Pages: 568 pages, biography. BIC Classification: PHFC; TTB. Category: (P) Professional & Vocational. Dimension: 234 x 156 x 29. Weight in Grams: 854.
The Fourth International Conference on Ion Implantation: Equipment and Tech- niques was held at the Convention Center in Berchtesgaden, Bavaria, Germany, from September 13 to 17, 1982. It was attended by more than 200 participants from over 20 different countries. Severa1 series of conferences have dealt with the app1ication of ion implantation to semiconductors and other materials (Thousand Oaks, 1970; Garmisch-Partenkirchen, 1971; Osaka, 1974; Warwick, 1975; Bou1der, 1975; Budapest, 1978; and Albany, 1980). Another series of conferences has been devoted to implantation equipment and techniques (S- ford, 1977; Trento, 1978; and Kingston, 1980). This conference was the fourth in the ... Read more
The Fourth International Conference on Ion Implantation: Equipment and Tech- niques was held at the Convention Center in Berchtesgaden, Bavaria, Germany, from September 13 to 17, 1982. It was attended by more than 200 participants from over 20 different countries. Severa1 series of conferences have dealt with the app1ication of ion implantation to semiconductors and other materials (Thousand Oaks, 1970; Garmisch-Partenkirchen, 1971; Osaka, 1974; Warwick, 1975; Bou1der, 1975; Budapest, 1978; and Albany, 1980). Another series of conferences has been devoted to implantation equipment and techniques (S- ford, 1977; Trento, 1978; and Kingston, 1980). This conference was the fourth in the ... Read more
Product Details
Format
Paperback
Publication date
2011
Publisher
Springer-Verlag Berlin and Heidelberg GmbH & Co. KG Germany
Number of pages
568
Condition
New
Series
Springer Series in Electronics and Photonics
Number of Pages
558
Place of Publication
Berlin, Germany
ISBN
9783642691584
SKU
V9783642691584
Shipping Time
Usually ships in 15 to 20 working days
Ref
99-15
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