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Ion Implantation in Microelectronics
A. H. Agajanian
€ 128.15
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Description for Ion Implantation in Microelectronics
paperback. Series: Computer Science Information Guides (Closed). Num Pages: 268 pages, biography. BIC Classification: TGM. Category: (P) Professional & Vocational. Dimension: 254 x 178 x 14. Weight in Grams: 515.
During the past ten years the use of ion implantation for doping semiconductors has become an active area of research and new device development. This doping technique has recently reached a level of maturity such that it is an integral step in the manu facturing of discrete semiconductor devices and integrated circuits. Ion implantation has significant advantages over diffusion such as: precision, purity, versatility, and automation; all of which are important for VLSI purposes. Ion implantation has also found new applications in magnetic bubble domain materials, superconductors, and materials synthesis. This book is a comprehensive bibliography of 2467 references of ... Read more
During the past ten years the use of ion implantation for doping semiconductors has become an active area of research and new device development. This doping technique has recently reached a level of maturity such that it is an integral step in the manu facturing of discrete semiconductor devices and integrated circuits. Ion implantation has significant advantages over diffusion such as: precision, purity, versatility, and automation; all of which are important for VLSI purposes. Ion implantation has also found new applications in magnetic bubble domain materials, superconductors, and materials synthesis. This book is a comprehensive bibliography of 2467 references of ... Read more
Product Details
Format
Paperback
Publication date
2012
Publisher
Springer-Verlag New York Inc. United States
Number of pages
268
Condition
New
Series
Computer Science Information Guides (Closed)
Number of Pages
266
Place of Publication
New York, NY, United States
ISBN
9781468461343
SKU
V9781468461343
Shipping Time
Usually ships in 15 to 20 working days
Ref
99-15
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