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Ion Implantation in Semiconductors and Other Materials
Billy . Ed(S): Crowder
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Description for Ion Implantation in Semiconductors and Other Materials
Paperback / so. Editor(s): Crowder, Billy. Series: IBM Research Symposia. Num Pages: black & white illustrations, bibliography. BIC Classification: PHFC; PHK; PNFS. Category: (G) General (US: Trade). Dimension: 244 x 170 x 34. Weight in Grams: 1052.
During the years since the first conference in this series was held at Thousand Oaks, California, in 1970, ion implantation has been an expanding and exciting research area. The advances in this field were so rapid that a second conference convened at Garmisch Partenkirchen, Germany, in 1971. At the present time, our under standing of the ion implantation process in semiconductors such as Si and Ge has reached a stage of maturity and ion implantation techniques are firmly established in semiconductor device technology. The advances in compound semiconductors have not been as rapid. There has also been a shift in ... Read more
During the years since the first conference in this series was held at Thousand Oaks, California, in 1970, ion implantation has been an expanding and exciting research area. The advances in this field were so rapid that a second conference convened at Garmisch Partenkirchen, Germany, in 1971. At the present time, our under standing of the ion implantation process in semiconductors such as Si and Ge has reached a stage of maturity and ion implantation techniques are firmly established in semiconductor device technology. The advances in compound semiconductors have not been as rapid. There has also been a shift in ... Read more
Product Details
Format
Paperback
Publication date
2012
Publisher
Springer United States
Condition
New
Series
IBM Research Symposia
Number of Pages
658
Place of Publication
New York, NY, United States
ISBN
9781468420661
SKU
V9781468420661
Shipping Time
Usually ships in 15 to 20 working days
Ref
99-15
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