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Ion Implantation Range and Energy Deposition Distributions
K. Bruce Winterbon
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Description for Ion Implantation Range and Energy Deposition Distributions
Paperback. Num Pages: 341 pages, biography. BIC Classification: TGMT. Category: (P) Professional & Vocational. Dimension: 297 x 210 x 19. Weight in Grams: 923.
The present level of understanding of ion implantation is sufficient that implantation Ls being used not only as a tool in various fields of research, but also as an industrial )rocess. In these applications one uses either the implanted ions, or their energy, to nodify some properties of the target substance, and is therefore concerned with the spatial listribution of the ions or of their energy. Following the pioneering work of Bohr [1), ~indhard and his collaborators have evolved a general description of the behaviour of swift Lons slowing down in amorphous targets [2,3,4), a description which has been the ... Read more
The present level of understanding of ion implantation is sufficient that implantation Ls being used not only as a tool in various fields of research, but also as an industrial )rocess. In these applications one uses either the implanted ions, or their energy, to nodify some properties of the target substance, and is therefore concerned with the spatial listribution of the ions or of their energy. Following the pioneering work of Bohr [1), ~indhard and his collaborators have evolved a general description of the behaviour of swift Lons slowing down in amorphous targets [2,3,4), a description which has been the ... Read more
Product Details
Format
Paperback
Publication date
2013
Publisher
Springer-Verlag New York Inc. United States
Number of pages
341
Condition
New
Number of Pages
341
Place of Publication
New York, NY, United States
ISBN
9781475756142
SKU
V9781475756142
Shipping Time
Usually ships in 15 to 20 working days
Ref
99-15
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