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Lithography
Stefan . Ed(S): Landis
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Description for Lithography
* Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents * A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. Editor(s): Landis, Stefan. Num Pages: 404 pages, Illustrations. BIC Classification: TJFC. Category: (P) Professional & Vocational. Dimension: 236 x 164 x 27. Weight in Grams: 744.
Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc.
Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc.
This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components.
Product Details
Publication date
2010
Publisher
ISTE Ltd and John Wiley & Sons Inc United Kingdom
Number of pages
404
Condition
New
Number of Pages
320
Format
Hardback
Place of Publication
London, United Kingdom
ISBN
9781848212022
SKU
V9781848212022
Shipping Time
Usually ships in 15 to 20 working days
Ref
99-15
About Stefan . Ed(S): Landis
Stefan Landis works at CEA-LETI-Minatec in Grenoble, France. He also lectures on next generation lithography in numerous engineering schools in France and in CEI-Europe Advanced Technology Education.
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