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Materials and Process Integration for MEMS
Francis E. H. . Ed(S): Tay
€ 193.42
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Description for Materials and Process Integration for MEMS
Hardback. Offers the background, tools, and directions you need to confidently choose fabrication methods and materials for miniaturization problems (materials, processes, designs, characterisations and potential applications). This title is suitable for academics and professionals who are active in the field of MEMS. Editor(s): Tay, Francis E. H. Series: Microsystems. Num Pages: 318 pages, biography. BIC Classification: TGM. Category: (UP) Postgraduate, Research & Scholarly. Dimension: 235 x 155 x 19. Weight in Grams: 636.
The field of materials and process integration for MEMS research has an extensive past as well as a long and promising future. Researchers, academicians and engineers from around the world are increasingly devoting their efforts on the materials and process integration issues and opportunities in MEMS devices. These efforts are crucial to sustain the long-term growth of the MEMS field. The commercial MEMS community is heavily driven by the push for profitable and sustainable products. In the course of establishing high volume and low-cost production processes, the critical importance of materials properties, behaviors, reliability, reproducibility, and predictability, as well as ... Read more
The field of materials and process integration for MEMS research has an extensive past as well as a long and promising future. Researchers, academicians and engineers from around the world are increasingly devoting their efforts on the materials and process integration issues and opportunities in MEMS devices. These efforts are crucial to sustain the long-term growth of the MEMS field. The commercial MEMS community is heavily driven by the push for profitable and sustainable products. In the course of establishing high volume and low-cost production processes, the critical importance of materials properties, behaviors, reliability, reproducibility, and predictability, as well as ... Read more
Product Details
Format
Hardback
Publication date
2002
Publisher
Kluwer Academic Publishers United States
Number of pages
318
Condition
New
Series
Microsystems
Number of Pages
299
Place of Publication
New York, NY, United States
ISBN
9781402071751
SKU
V9781402071751
Shipping Time
Usually ships in 15 to 20 working days
Ref
99-15
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