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Materials & Process Integration for MEMS
Francis E. H. . Ed(S): Tay
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Description for Materials & Process Integration for MEMS
Paperback. Editor(s): Tay, Francis E. H. Series: Microsystems. Num Pages: 318 pages, biography. BIC Classification: PHD; TGMT. Category: (P) Professional & Vocational. Dimension: 234 x 156 x 17. Weight in Grams: 504.
The field of materials and process integration for MEMS research has an extensive past as well as a long and promising future. Researchers, academicians and engineers from around the world are increasingly devoting their efforts on the materials and process integration issues and opportunities in MEMS devices. These efforts are crucial to sustain the long-term growth of the MEMS field. The commercial MEMS community is heavily driven by the push for profitable and sustainable products. In the course of establishing high volume and low-cost production processes, the critical importance of materials properties, behaviors, reliability, reproducibility, and predictability, as well as ... Read more
The field of materials and process integration for MEMS research has an extensive past as well as a long and promising future. Researchers, academicians and engineers from around the world are increasingly devoting their efforts on the materials and process integration issues and opportunities in MEMS devices. These efforts are crucial to sustain the long-term growth of the MEMS field. The commercial MEMS community is heavily driven by the push for profitable and sustainable products. In the course of establishing high volume and low-cost production processes, the critical importance of materials properties, behaviors, reliability, reproducibility, and predictability, as well as ... Read more
Product Details
Format
Paperback
Publication date
2010
Publisher
Springer-Verlag New York Inc. United States
Number of pages
318
Condition
New
Series
Microsystems
Number of Pages
299
Place of Publication
New York, NY, United States
ISBN
9781441953032
SKU
V9781441953032
Shipping Time
Usually ships in 15 to 20 working days
Ref
99-15
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