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Design and Manufacturing of Active Microsystems
. Ed(S): Buttgenbach, Stephanus; Burisch, Arne; Hesselbach, Jurgen
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Description for Design and Manufacturing of Active Microsystems
hardcover. This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516 where the focus is on active micro systems based on the electromagnetic actuator principle. Editor(s): Buttgenbach, Stephanus; Burisch, Arne; Hesselbach, Jurgen. Series: Microtechnology and MEMS. Num Pages: 456 pages, biography. BIC Classification: TBN; TGB; TGP; TJF. Category: (P) Professional & Vocational. Dimension: 235 x 155 x 30. Weight in Grams: 842.
This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. The research efforts of this collaboration are focused on active micro systems which are based on the electromagnetic actuator principle. The travel of the investigated actuator systems is on the order of several millimeters. The total construction size of the actuator is on the range of several centimeters whereas essential structures being several micrometers. The methods and the production technologies that are investigated on the basis of various research models incorporate the fundamental process chains of microsystems.
This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. The research efforts of this collaboration are focused on active micro systems which are based on the electromagnetic actuator principle. The travel of the investigated actuator systems is on the order of several millimeters. The total construction size of the actuator is on the range of several centimeters whereas essential structures being several micrometers. The methods and the production technologies that are investigated on the basis of various research models incorporate the fundamental process chains of microsystems.
Product Details
Format
Hardback
Publication date
2011
Publisher
Springer Germany
Number of pages
456
Condition
New
Series
Microtechnology and MEMS
Number of Pages
444
Place of Publication
Berlin, Germany
ISBN
9783642129025
SKU
V9783642129025
Shipping Time
Usually ships in 15 to 20 working days
Ref
99-15
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