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Shape and Functional Elements of the Bulk Silicon Microtechnique
Joachim Fruhauf
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Description for Shape and Functional Elements of the Bulk Silicon Microtechnique
Paperback. Num Pages: 222 pages, biography. BIC Classification: TGM. Category: (P) Professional & Vocational. Dimension: 235 x 155 x 13. Weight in Grams: 367.
The idea for this manual was created by the author and Birgit Hannemann (now Professor at the University of Applied Sciences, Bremen, Germany) as an internal catalogue of results of several years of investigations at the Chemnitz University of Technology, Germany. At this base supplying investigations and the elabo- tion of the manuscript were supported by the Stiftung Industrieforschung, Bonn, Germany. In the course of this the coworkers of the author Eva Gartner, Steffi Kronert and Cornelia Kowol were directly involved. All the SEM pictures result from preparations performed at the Centre of - crotechnologies at the Chemnitz University of ... Read more
The idea for this manual was created by the author and Birgit Hannemann (now Professor at the University of Applied Sciences, Bremen, Germany) as an internal catalogue of results of several years of investigations at the Chemnitz University of Technology, Germany. At this base supplying investigations and the elabo- tion of the manuscript were supported by the Stiftung Industrieforschung, Bonn, Germany. In the course of this the coworkers of the author Eva Gartner, Steffi Kronert and Cornelia Kowol were directly involved. All the SEM pictures result from preparations performed at the Centre of - crotechnologies at the Chemnitz University of ... Read more
Product Details
Format
Paperback
Publication date
2010
Publisher
Springer-Verlag Berlin and Heidelberg GmbH & Co. KG Germany
Number of pages
222
Condition
New
Number of Pages
222
Place of Publication
Berlin, Germany
ISBN
9783642060489
SKU
V9783642060489
Shipping Time
Usually ships in 15 to 20 working days
Ref
99-15
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