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Metal Impurities in Silicon-Device Fabrication
Klaus Graff
€ 127.70
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Description for Metal Impurities in Silicon-Device Fabrication
Paperback. Series: Springer Series in Materials Science. Num Pages: 285 pages, biography. BIC Classification: TGMT; TJFD. Category: (P) Professional & Vocational. Dimension: 235 x 155 x 16. Weight in Grams: 450.
Metal Impurities in Silicon-Device Fabrication treats the transition-metal impurities generated during the fabrication of silicon samples and devices. The different mechanisms responsible for contamination are discussed, and a survey is given of their impact on device performance. The specific properties of the main and rare impurities in silicon are examined, as well as the detection methods and requirements in modern technology. Finally, impurity gettering is studied along with modern techniques to determine the gettering efficiency. In all of these subjects, reliable and up-to-date data are presented. This monograph provides a thorough review of the results of recent scientific investigations, as ... Read more
Metal Impurities in Silicon-Device Fabrication treats the transition-metal impurities generated during the fabrication of silicon samples and devices. The different mechanisms responsible for contamination are discussed, and a survey is given of their impact on device performance. The specific properties of the main and rare impurities in silicon are examined, as well as the detection methods and requirements in modern technology. Finally, impurity gettering is studied along with modern techniques to determine the gettering efficiency. In all of these subjects, reliable and up-to-date data are presented. This monograph provides a thorough review of the results of recent scientific investigations, as ... Read more
Product Details
Format
Paperback
Publication date
2012
Publisher
Springer-Verlag Berlin and Heidelberg GmbH & Co. KG Germany
Number of pages
285
Condition
New
Series
Springer Series in Materials Science
Number of Pages
270
Place of Publication
Berlin, Germany
ISBN
9783642629655
SKU
V9783642629655
Shipping Time
Usually ships in 15 to 20 working days
Ref
99-15
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