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Micro and Nano Fabrication
Gatzen, Hans H.; Saile, Volker
€ 113.02
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Description for Micro and Nano Fabrication
Paperback. Num Pages: 545 pages, 303 black & white illustrations, 54 colour illustrations, 25 black & white tables, biogra. BIC Classification: TDPB; TGXT; TGXW. Category: (P) Professional & Vocational. Dimension: 235 x 155 x 28. Weight in Grams: 831.
For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.
Product Details
Format
Paperback
Publication date
2016
Publisher
Springer-Verlag Berlin and Heidelberg GmbH & Co. KG Germany
Number of pages
545
Condition
New
Number of Pages
519
Place of Publication
Berlin, Germany
ISBN
9783662508268
SKU
V9783662508268
Shipping Time
Usually ships in 15 to 20 working days
Ref
99-15
About Gatzen, Hans H.; Saile, Volker
Hans Gatzen received a PhD equivalent in Mechanical Engineering from the RWTH Aachen in Aachen, Germany, and held various positions in the computer peripherals industry in Germany and the U.S. from 1973 to 1992. In 1992, he founded the Institute for Microtechnology (imt) at the Hanover University in Hanover, Germany (now Leibniz Universität Hannover) and was its director until his ... Read more
Reviews for Micro and Nano Fabrication
“The book is clearly written and easy to read. The various topics are balanced and well organized. … The numerous figures and schematics are the most useful tools of the book. … It is useful to students and newcomers, but also experts may find it a good reference because there are some useful aspects not easily found in other books ... Read more