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Micro/Nano Integrated Fabrication Technology and its Applications in Microenergy Harvesting
Xiao-Sheng Zhang
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Description for Micro/Nano Integrated Fabrication Technology and its Applications in Microenergy Harvesting
Hardback. Series: Springer Theses. Num Pages: 142 pages, 19 black & white illustrations, 76 colour illustrations, 94 colour tables, biography. BIC Classification: TBN; TDCB; TDPB; THRB; TJF. Category: (P) Professional & Vocational. Dimension: 235 x 155 x 10. Weight in Grams: 385.
This book presents a universal mass-production micro/nano integrated fabrication technology, which can be used to realize micro/nano hierarchical structures on Si-based materials and flexible polymeric materials. This fabrication technology has been systematically investigated by using experimental measurements, mechanism analyses, theoretical simulations and so on. Three common materials (i.e., silicon, PDMS and Parylene-C) with micro/nano hierarchical structures have been successfully fabricated, which also show several attractive properties. Furthermore, this book introduces this fabrication technology into microenergy field, and proposes several high-performance nanogenerators, of which practical applications have also been studied in commercial electronic device and biomedical microsystem.
This book presents a universal mass-production micro/nano integrated fabrication technology, which can be used to realize micro/nano hierarchical structures on Si-based materials and flexible polymeric materials. This fabrication technology has been systematically investigated by using experimental measurements, mechanism analyses, theoretical simulations and so on. Three common materials (i.e., silicon, PDMS and Parylene-C) with micro/nano hierarchical structures have been successfully fabricated, which also show several attractive properties. Furthermore, this book introduces this fabrication technology into microenergy field, and proposes several high-performance nanogenerators, of which practical applications have also been studied in commercial electronic device and biomedical microsystem.
Product Details
Format
Hardback
Publication date
2015
Publisher
Springer-Verlag Berlin and Heidelberg GmbH & Co. KG Germany
Number of pages
142
Condition
New
Series
Springer Theses
Number of Pages
122
Place of Publication
Berlin, Germany
ISBN
9783662488140
SKU
V9783662488140
Shipping Time
Usually ships in 15 to 20 working days
Ref
99-15
About Xiao-Sheng Zhang
Dr. Zhang Xiao-Sheng is currently working as a postdoctoral researcher at École Polytechnique Fédérale de Lausanne (EPFL), Switzerland, and as a visiting researcher at the University of Tokyo. His research interests mainly include three areas: (1) micro/nano integrated fabrication technology; (2) micro/nano energy technology; (3) smart drug delivery system. HONORS & AWARDS • ... Read more
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