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Microlithography: Science and Technology
Bruce W. Smith
€ 224.70
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Description for Microlithography: Science and Technology
hardcover. This edition provides a balanced treatment of theoretical and operational considerations, from elementary concepts to advanced aspects of modern submicron microlithography. Each chapter reflects the current research and practices from the world's leading academic and industrial laboratories detailed by a stellar panel of international experts. Num Pages: 900 pages. BIC Classification: TJFC. Category: (G) General (US: Trade). .
Product Details
Format
Hardback
Publication date
2020
Publisher
CRC Press United States
Number of pages
900
Condition
New
ISBN
9781439876756
SKU
V9781439876756
Shipping Time
Usually ships in 15 to 20 working days
Ref
99-2
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