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Physics Of Microfabrication
Brodie, Ivor; Muray, Julius J.
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Description for Physics Of Microfabrication
Paperback. Num Pages: 504 pages, biography. BIC Classification: THR; TJFD. Category: (P) Professional & Vocational. Dimension: 234 x 156 x 26. Weight in Grams: 727.
The Physical Electronics Department of SRI International (formerly Stanford Research Institute) has been pioneering the development of devices fabricated to submicron tolerances for well over 20 years. In 1961, a landmark paper on electron-beam lithography and its associated technologies was published by K. R. Shoulderst (then at SRI), which set the stage for our subsequent efforts in this field. He had the foresight to believe that the building of such small devices was actually within the range of human capabilities. As a result of this initial momentum, our experience in the technologies associated with microfabrication has become remarkably comprehensive, despite ... Read more
The Physical Electronics Department of SRI International (formerly Stanford Research Institute) has been pioneering the development of devices fabricated to submicron tolerances for well over 20 years. In 1961, a landmark paper on electron-beam lithography and its associated technologies was published by K. R. Shoulderst (then at SRI), which set the stage for our subsequent efforts in this field. He had the foresight to believe that the building of such small devices was actually within the range of human capabilities. As a result of this initial momentum, our experience in the technologies associated with microfabrication has become remarkably comprehensive, despite ... Read more
Product Details
Format
Paperback
Publication date
2013
Publisher
Springer-Verlag New York Inc. United States
Number of pages
504
Condition
New
Number of Pages
504
Place of Publication
New York, United States
ISBN
9781489921628
SKU
V9781489921628
Shipping Time
Usually ships in 15 to 20 working days
Ref
99-15
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