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Fundamental Electron Interactions with Plasma Processing Gases
Christophorou, L. G.; Olthoff, James Kenneth
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Description for Fundamental Electron Interactions with Plasma Processing Gases
Hardback. Deals with the basic knowledge and understanding of the fundamental interactions of low-energy electrons with molecules. This volume discusses the advances in electron-molecule interaction processes, and provides an account of the fundamental interactions of low-energy electrons with molecules in modern technology. Series: Physics of Atoms and Molecules. Num Pages: 796 pages, biography. BIC Classification: PHFC. Category: (G) General (US: Trade); (U) Tertiary Education (US: College). Dimension: 235 x 155 x 43. Weight in Grams: 2850.
This volume deals with the basic knowledge and understanding of fundamental interactions of low energy electrons with molecules. It pro vides an up-to-date and comprehensive account of the fundamental in teractions of low-energy electrons with molecules of current interest in modern technology, especially the semiconductor industry. The primary electron-molecule interaction processes of elastic and in elastic electron scattering, electron-impact ionization, electron-impact dissociation, and electron attachment are discussed, and state-of-the art authoritative data on the cross sections of these processes as well as on rate and transport coefficients are provided. This fundamental knowledge has been obtained by us over the last ... Read more
This volume deals with the basic knowledge and understanding of fundamental interactions of low energy electrons with molecules. It pro vides an up-to-date and comprehensive account of the fundamental in teractions of low-energy electrons with molecules of current interest in modern technology, especially the semiconductor industry. The primary electron-molecule interaction processes of elastic and in elastic electron scattering, electron-impact ionization, electron-impact dissociation, and electron attachment are discussed, and state-of-the art authoritative data on the cross sections of these processes as well as on rate and transport coefficients are provided. This fundamental knowledge has been obtained by us over the last ... Read more
Product Details
Format
Hardback
Publication date
2003
Publisher
Springer Science+Business Media United States
Number of pages
796
Condition
New
Series
Physics of Atoms and Molecules
Number of Pages
781
Place of Publication
, United States
ISBN
9780306480379
SKU
V9780306480379
Shipping Time
Usually ships in 15 to 20 working days
Ref
99-15
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