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Glow Discharge Processes
Brian Chapman
€ 281.55
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Description for Glow Discharge Processes
Hardcover. Num Pages: 432 pages, illustrations, bibliography, index. BIC Classification: PHK. Category: (P) Professional & Vocational; (UP) Postgraduate, Research & Scholarly; (UU) Undergraduate. Dimension: 236 x 164 x 29. Weight in Grams: 762.
Develops detailed understanding of the deposition and etching of materials by sputtering discharge, and of etching of materials by chemically active discharge. Treats glow discharge at several levels from basic phenomena to industrial applications--practical techniques diligently related to fundamentals. Subjects range from voltage, distributions encountered in plasma etching systems to plasma-electron interactions that contribute to sustaining the discharge.
Develops detailed understanding of the deposition and etching of materials by sputtering discharge, and of etching of materials by chemically active discharge. Treats glow discharge at several levels from basic phenomena to industrial applications--practical techniques diligently related to fundamentals. Subjects range from voltage, distributions encountered in plasma etching systems to plasma-electron interactions that contribute to sustaining the discharge.
Product Details
Format
Hardback
Publication date
1980
Publisher
John Wiley and Sons Ltd United States
Number of pages
432
Condition
New
Number of Pages
432
Place of Publication
, United States
ISBN
9780471078289
SKU
V9780471078289
Shipping Time
Usually ships in 7 to 11 working days
Ref
99-50
About Brian Chapman
Brian Chapman is the author of Glow Discharge Processes: Sputtering and Plasma Etching, published by Wiley.
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