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Ion Implantation Techniques
. Ed(S): Ryssel, Heiner; Glawischnig, H.
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Description for Ion Implantation Techniques
Paperback. Editor(s): Ryssel, Heiner; Glawischnig, H. Series: Springer Series in Electronics and Photonics. Num Pages: 386 pages, biography. BIC Classification: PHFC; TBC; TGM. Category: (P) Professional & Vocational. Dimension: 229 x 152 x 20. Weight in Grams: 565.
In recent years, ion implantation has developed into the major doping technique for integrated circuits. Several series of conferences have dealt with the application of ion implantation to semiconductors and other materials (Thousand Oaks 1970, Garmisch-Partenkirchen 1971, Osaka 1974, Warwick 1975, Boulder 1976, Budapest 1978, and Albany 1980). Another series of conferences was devoted more to implantation equipment and tech- niques (Salford 1977, Trento 1978, and Kingston 1980). In connection with the Third International Conference on Ion Implantation: Equipment and Tech- niques, held at Queen's University,' Kingston, Ontario, Canada, July 8-11, 1980, a two-day instructional program was organized parallel to ... Read more
In recent years, ion implantation has developed into the major doping technique for integrated circuits. Several series of conferences have dealt with the application of ion implantation to semiconductors and other materials (Thousand Oaks 1970, Garmisch-Partenkirchen 1971, Osaka 1974, Warwick 1975, Boulder 1976, Budapest 1978, and Albany 1980). Another series of conferences was devoted more to implantation equipment and tech- niques (Salford 1977, Trento 1978, and Kingston 1980). In connection with the Third International Conference on Ion Implantation: Equipment and Tech- niques, held at Queen's University,' Kingston, Ontario, Canada, July 8-11, 1980, a two-day instructional program was organized parallel to ... Read more
Product Details
Format
Paperback
Publication date
2011
Publisher
Springer-Verlag Berlin and Heidelberg GmbH & Co. KG Germany
Number of pages
386
Condition
New
Series
Springer Series in Electronics and Photonics
Number of Pages
374
Place of Publication
Berlin, Germany
ISBN
9783642687815
SKU
V9783642687815
Shipping Time
Usually ships in 15 to 20 working days
Ref
99-15
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