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Photomodulated Optical Reflectance
Janusz Bogdanowicz
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Description for Photomodulated Optical Reflectance
Paperback. This singular non-invasive technique for in-line metrology is an outstanding contribution to the field, reporting significant advances in testing the properties of semiconductors, such as the characteristics of ultra-shallow junctions, without destroying them. Series: Springer Theses. Num Pages: 228 pages, biography. BIC Classification: PHV; TJFD5. Category: (P) Professional & Vocational. Dimension: 235 x 155 x 12. Weight in Grams: 355.
One of the critical issues in semiconductor technology is the precise electrical characterization of ultra-shallow junctions. Among the plethora of measurement techniques, the optical reflectance approach developed in this work is the sole concept that does not require physical contact, making it suitable for non-invasive in-line metrology. This work develops extensively all the fundamental physical models of the photomodulated optical reflectance technique and introduces novel approaches that extend its applicability from dose monitoring towards detailed carrier profile reconstruction. It represents a significant breakthrough in junction metrology with potential for industrial implementation.
One of the critical issues in semiconductor technology is the precise electrical characterization of ultra-shallow junctions. Among the plethora of measurement techniques, the optical reflectance approach developed in this work is the sole concept that does not require physical contact, making it suitable for non-invasive in-line metrology. This work develops extensively all the fundamental physical models of the photomodulated optical reflectance technique and introduces novel approaches that extend its applicability from dose monitoring towards detailed carrier profile reconstruction. It represents a significant breakthrough in junction metrology with potential for industrial implementation.
Product Details
Format
Paperback
Publication date
2014
Publisher
Springer-Verlag Berlin and Heidelberg GmbH & Co. KG Germany
Number of pages
228
Condition
New
Series
Springer Theses
Number of Pages
204
Place of Publication
Berlin, Germany
ISBN
9783642426865
SKU
V9783642426865
Shipping Time
Usually ships in 15 to 20 working days
Ref
99-15
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