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Wei Gao - Precision Nanometrology - 9781447157434 - V9781447157434
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Precision Nanometrology

€ 269.32
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Description for Precision Nanometrology Paperback. This book describes the latest optical sensors used to measure angle and displacement in precision nanometrology, and presents scanning-type measuring systems for use in surface forms and stage motions. Coverage includes algorithms and experimental data. Series: Springer Series in Advanced Manufacturing. Num Pages: 367 pages, 3 black & white tables, biography. BIC Classification: PDDM; PHFC; TBN; TDPB; TGXT; TJFM. Category: (G) General (US: Trade). Dimension: 235 x 155 x 20. Weight in Grams: 569.
Precision Nanometrology describes the new field of precision nanometrology, which plays an important part in nanoscale manufacturing of semiconductors, optical elements, precision parts and similar items. It pays particular attention to the measurement of surface forms of precision workpieces and to stage motions of precision machines. The first half of the book is dedicated to the description of optical sensors for the measurement of angle and displacement, which are fundamental quantities for precision nanometrology. The second half presents a number of scanning-type measuring systems for surface forms and stage motions. The systems discussed include: • error separation algorithms and ... Read more

Product Details

Format
Paperback
Publication date
2014
Publisher
Springer London Ltd United Kingdom
Number of pages
367
Condition
New
Series
Springer Series in Advanced Manufacturing
Number of Pages
354
Place of Publication
England, United Kingdom
ISBN
9781447157434
SKU
V9781447157434
Shipping Time
Usually ships in 15 to 20 working days
Ref
99-15

About Wei Gao
Professor Wei Gao received his Bachelor degree in precision instrumentation engineering from Shanghai Jiao Tong University, China in 1986, followed by MS and PhD degrees in precision engineering from Tohoku University, Japan in 1991 and 1994, respectively. He is currently a professor and the director of the Research Center for Precision Nanosystems in the Department of Nanomechanics, Tohoku University. He ... Read more

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