Sputtering by Particle Bombardment
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Description for Sputtering by Particle Bombardment
Hardback. Series: Topics in Applied Physics. Num Pages: 509 pages, 201 black & white illustrations, 78 black & white tables. BIC Classification: PHV; TGM. Category: (P) Professional & Vocational. Dimension: 235 x 155 x 24. Weight in Grams: 844.
Earlier books on this subject, i.e. "Sputtering by Particle Bombardment I - III" are nearly 20 years old, but since then a lot of new and important work has been performed and published in international journals. The planned book brings an overview about all the new results. This concerns especially a new summary of the measured and calculated sputtering yields with an algebraic approximation formula for the energy and angular dependence of the yields. This is especially useful for all colleagues, who need sputtering yields for physics and/or applied problems. The computational methods for calculating sputtering yields are critically reviewed, ... Read more
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Format
Hardback
Publication date
2007
Publisher
Springer-Verlag Berlin and Heidelberg GmbH & Co. KG Germany
Number of pages
509
Condition
New
Series
Topics in Applied Physics
Number of Pages
509
Place of Publication
Berlin, Germany
ISBN
9783540445005
SKU
V9783540445005
Shipping Time
Usually ships in 15 to 20 working days
Ref
99-15
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