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Polycrystalline Silicon for Integrated Circuit Applications
Theodore I. Kamins
€ 193.10
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Description for Polycrystalline Silicon for Integrated Circuit Applications
Hardback. Series: The Springer International Series in Engineering and Computer Science. Num Pages: 290 pages, biography. BIC Classification: TJFD. Category: (P) Professional & Vocational; (UP) Postgraduate, Research & Scholarly. Dimension: 234 x 156 x 19. Weight in Grams: 609.
Recent years have seen silicon integrated circuits enter into an increasing number of technical and consumer applications, until they now affect everyday life, as well as technical areas. Polycrystalline silicon has been an important component of silicon technology for nearly two decades, being used first in MOS integrated circuits and now becoming pervasive in bipolar circuits, as well. During this time a great deal of informa tion has been published about polysilicon. A wide range of deposition conditions has been used to form films exhibiting markedly different properties. Seemingly contradictory results can often be explained by considering the details of ... Read more
Recent years have seen silicon integrated circuits enter into an increasing number of technical and consumer applications, until they now affect everyday life, as well as technical areas. Polycrystalline silicon has been an important component of silicon technology for nearly two decades, being used first in MOS integrated circuits and now becoming pervasive in bipolar circuits, as well. During this time a great deal of informa tion has been published about polysilicon. A wide range of deposition conditions has been used to form films exhibiting markedly different properties. Seemingly contradictory results can often be explained by considering the details of ... Read more
Product Details
Format
Hardback
Publication date
1988
Publisher
Kluwer Academic Publishers United States
Number of pages
290
Condition
New
Series
The Springer International Series in Engineering and Computer Science
Number of Pages
290
Place of Publication
, United States
ISBN
9780898382594
SKU
V9780898382594
Shipping Time
Usually ships in 15 to 20 working days
Ref
99-15
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